【摘要】 低温共烧陶瓷(LTCC)是现代微电子封装中重要的研究分支,主要用于高速、高频系统。介绍了低温共烧陶瓷的发展历程及其中包含的若干重大研究热点,如铜布线工艺、收缩率匹配、LTCC散热等。更多还原

【Abstract】 Low temperature cofired ceramics (LTCC) is one of the important research areas in microelectronic package. It’s widely used in high frequency systems. This paper reviews the history of LTCC and some research subjects that draw most interest such as copper metallization, match-problem of shrinkage and LTCC heat dissipation are also discussed.更多还原