【摘要】 报道了以TiCl4 和V2 O5为源 ,采用等离子增强化学气相沉积 (PECVD)和溶胶 -凝胶 (sol-gel)技术制备了TiO2 /V2 O5双层薄膜 ,将该薄膜沉积在带有金梳状电极的陶瓷管和硅片上 ,进行了X射线衍射(XRD)分析 ,并且测量其对三甲基胺 (TMA)的气敏特性。结果发现该双层薄膜对TMA具有高灵敏度、良好的选择特性和快速的响应恢复特性。更多还原

【Abstract】 TiO₂/V₂O₅ double-layer thin films have been prep ared on a silicon and a porcelain tube with gold comb-type electrodes by means o f plasma enhanced chemical vapour deposition （PECVD）technique and sol-gel proc ess with TiCl 4 and V 2O 5 as the precursors. X-ray diffraction was used to c haracterize the thin films. The sensing characteristics of the thin film sensors to trimethylamine（TMA）are measured. A high sensitivity, excellent selectivity , quick response and recovery of thin film sensors to TMA are obtained herein.更多还原