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半导体氧化物气体传感器测试新原理与方法
The New Measurement Principle and Method for Semi-Conductor Oxide Gas Sensors
【摘要】 本文基于半导体氧化物的气体敏感机理,提出对其测试的新原理和方法,通过试验发现,这种动态测试方法不仅能提高半导体氧化物的选择性和稳定性,而且能从混合气体中分辨出特定的气体成分,判断出大致的逍度.用这种方法,同一种气体传感器通过不同的测试手段可以检测不同的气体.
【Abstract】 Based on gas sensitive mechanism for semi-conductor oxide, we propose a new measurement principle and method. This circulation measuring mcthod of change temperaturenot only give rise to sclsctivity and stability than highcr, but also recognize special gas from mix gas,and single gas sensor can test several gas by this method.
【关键词】 半导体氧化物;
气敏特性;
动态测试方法;
选择性;
稳定性;
【Key words】 semi-conductor oxide gas sensitive characteristic circulation measuring method selectivity stability;
【Key words】 semi-conductor oxide gas sensitive characteristic circulation measuring method selectivity stability;
【基金】 国家自然科学基金!69774028
- 【文献出处】 传感技术学报 ,JOURNAL OF TRANSCLUCTION TECHNOLOGY , 编辑部邮箱 ,2000年02期
- 【分类号】TP212
- 【被引频次】85
- 【下载频次】793