【摘要】 较详细地分析了影响半导体力敏传感器性能的因素；介绍了圆膜片、片方膜、短形膜片上芯片的最佳设计方法．对研制开发新型的力敏传感器有一定的指导意义．更多还原

【Abstract】 In the paper, the factors affecting to semiconducter mechanics sensor function are analysed in detail. The design method of mechanics sensor with circular, square and rectangular chip in the supreme condition are introduced. These analyses have a direct significances guiding development, and designation of a new mehanics sensor.更多还原