【摘要】 本文分析了各种力的尺寸效应及表面张力对悬臂梁式微型阀启动的影响，得到了阀的开启压力．分析了微型阀的静态和动态过流特性，分别得到了阀的静态压差－流量曲线；当阀片两侧的压差随时间变化时，阀片的启闭与压差的变化之间存在一定的相位差，有可能引起泄漏甚至反向流动．更多还原

【Abstract】 In this paper, dimensional effects of various forces were mentioned and the effect of surface tension force on prime pressure of cantilever microvalve was analyzed. The prime pressure of microvalve was obtained. The static and dynamic characterizations of cantilever microvalve were analyzed. The relationships between static pressure difference and flow rate, and between frequency and flow rate were also obtained respectively. When the pressure difference changes with time, a phase shift occurs between the transient pressure difference and the displace of the valve flap, which cause leakage and even reverse flow.更多还原