【摘要】 简单地叙述了金属等离子体浸没离子注入与沉积（MePIIID）表面处理新工艺的发展，以及MePIIID工艺对于脉冲阴极弧金属等离子体源的要求。详细报导了9Cr18轴承钢样品的氮离子注入表面处理工艺以及金属离子加氮离子复合注入处理新工艺。对被处理和未被处理试样进行了显微硬度、磨痕、摩擦因数及腐蚀特性测试后表明：用金属离子加氮离子复合注入处理的9Cr18钢试样的表面特性改善明显优于只用氮离子处理的试样，证明脉冲阴极弧金属等离子体源和气体等离子体浸没离子注入相结合是现代材料表面强化的一个很有效的手段。更多还原

【Abstract】 Development of the new surface treatment technique of metal plasma immersion ion implantation and deposition (MePIII D) was briefly described, and the demand for pulse cathodic arc metal plasme source under the conditions of the MePIII D technique was presented in the paper.The surface treatment technique using nitrogen ion implantation and the multiple implantation treatment technique of metal and nitrogen ions on 9Cr18 bearing steel samples were reported in details. The microhardness,wear scar, coefficient of friction, and corrosion behavior were measured fro the treated and untreated samples, in was shown that improvement of surface properties of 9Cr18 steel samples treated by the multiple implantation is better than the samples treated only by nitrogen implantation, and the combination of pules cathodic arc metal plasma source wity gas plasma immersion ion implantation is a very effective way for surface strengthening of modern materials.更多还原