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溶胶-凝胶制备二氧化硅薄膜的开裂问题研究

Study on the Cracking of Silica Films Prepared by Sol-Gel Process

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【作者】 方平安吴召平

【Author】 FANG Ping?an, WU Zhao?ping (Shanghai Institute of Ceramics, Chinese Academy of Science, Shanghai 200050, China)

【机构】 中国科学院上海硅酸盐研究所!上海200050

【摘要】 为制备微晶玻璃增强用二氧化硅薄膜 ,采用溶胶 -凝胶工艺 (SOL -GEL)在普通钠钙硅玻璃基片上做了预试 ,对过程中薄膜的开裂问题进行了详细的分析和研究。结果表明 :溶胶的组成与凝胶干燥和热处理过程中的应力不均是开裂的主要原因。借助差热分析 (DTA)、红外吸收光谱分析 (IR)、高倍光学显微镜等分析测试手段 ,通过调整原料配比、控制干燥过程的相对湿度和调节热处理过程中的升温速率 ,较好地解决了膜面开裂问题 ,获得了表面均匀不开裂的二氧化硅薄膜。

【Abstract】 The silica films, which are used to strengthen glass-ceramics,were prefabrica- ted by sol-gel process on the silicate substrates. The reason for the cracking of films is discussed and analyzed in detail. The result shows that the cracking of the gel films is mainly related to the composition of sol and the unbalanced stress produced during drying and hea- ting process. The silica films without cracks, characterized by DTA, IR and high resolution optical microscope methods et al, were obtained by modifying the composition of sol and controlling the relative humidity and the heating rate of heat treatment.

【关键词】 二氧化硅薄膜溶胶-凝胶开裂
【Key words】 Silica filmsSol-gel processCracking
  • 【分类号】TQ171
  • 【被引频次】87
  • 【下载频次】1645
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