【摘要】 在论述冷轧钢板表面三维微观形貌测量必要性的基础上 ,介绍了利用白光干涉特性进行测量的扫描白光干涉法的测量原理及测量系统 ,采用幅值解调算法确定测试点高度 ,既提高了测量精度又缩短了测量时间。由一个冷轧钢板测量实例 ,列出了经过平滑处理后的具有良好视觉效果的三维微观形貌图更多还原

【Abstract】 Based on the description of the importance of surface 3D micro topography measurement,this paper presents the measuring principle and measuring system of scanning white light interferometry making use of the characteristic of white light interference.The amplitude demodulation algorithm is adopted to determine the height of measuring point,which not only improves measuring accuracy but also reduces measuring time.A surface measuring example of cold rolled steel sheet provids a 3D micro surface topography bearing fine visual effect after smooth processing.更多还原