【摘要】 根据有限厚度样品体电阻率和薄层电阻两种测试方法间的厚度修正系数的相关性，论证了其边缘效应修正系数具有一一对应的严格的相等性。通过实验予以证明，并可将这一结论应用于非圆心点测试。更多还原

【Abstract】 This paper puts forward an equivalence relation of the correction factors for the boundary effect, according to the relation of the thickness correction factors between two measurement methods of the bulk resistivity and sheet resistance for the specimens with a finite thickness. It has been confirmed through experiment, and can be used for the measurement with the four-point probe out of the center of the specimens.更多还原