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新型集成微麦克风和扬声器的结构设计
Structural Design of a New Integrated Microphone and Microspeaker
【摘要】 在现有的硅基Pb(Zr,Ti)O3(PZT)铁电薄膜的制备工艺基础上,提出了一种以PZT悬臂式振膜为核心的集成微麦克风和扬声器结构,对其进行了优化设计。对微麦克风和扬声器的灵敏度和声输出进行了理论计算。并比较了基于PZT和ZnO两种材料的微麦克风和扬声器的性能差异。
【Abstract】 Based on the fabrication process of Pb(Zr,Ti)O3 (PZT) thin films, a new PZT cantilever structure applied to the integrated microphone and microspeaker was presented. The structural parameters were optimized theoretically, and the sensitivity and output sound pressure of this device were calculated. Differences between PZT and ZnO microphone and microspeaker were given.
【基金】 国家自然科学基金!69806007;清华大学基础研究基金
- 【文献出处】 半导体技术 ,Semiconductor Technology , 编辑部邮箱 ,2000年05期
- 【分类号】TN64
- 【被引频次】2
- 【下载频次】255