【摘要】 结合器件具体结构和工艺，在回流效应理论和实验研究的基础上优化设计了回流加固结构。建立了一套自动测试系统，对回流加固结构样管进行了电热加速应力试验，考核了不同结构的加固效果及抗热电迁徙性能，优选了最佳回流结构。更多还原

【Abstract】 The Backflow effect plays an important role in electromigration. On the basis of the theory and experiments of backflow effect, a novel structure was designed and used to enhance the electromigration resistance of metalliziation in microwave devics. The reliability of samples with six kinds of structures was tested under ramping current and constant current stress. The relationship between electromigration resistance and structure design has been obtained.更多还原