【摘要】 报道了采用质子注入制作平面掩埋条形高频DFB激光器。质子注入提高了限制层对电流的限制作用 ,并减小了限制层的寄生电容 ;DFB激光器的斜率效率由注入前的 0 .147mW /mA提高到 0 .2 16mW /mA ;电容测试结果表明 :质子注入使 pnpn结构的势垒电容明显减小 ,激光器的寄生电容由注入前的约 10 0 pF降至注入后的 6 pF ;激光器的 3dB调制带宽由注入前的 50 0MHz提高到 5.6 6GHz。高温老化筛选结果表明 ,质子注入对激光器的可靠性基本没有影响。更多还原

【Abstract】 Proton was used to fabricate high-frequency planar pn junction buried-heterostructure DFB lasers for improving optical and electrical characteristics.The capacitance of the current blocking layer decreases from 100 pF to 6 pF,while the slope efficiency of P o- I increases from 0.147 mW/mA to 0.216 mW/mA.And 3 dB modulation bandwidth of this type lasers is improved from 500 MHz to 5.66 GHz after proton implantation.It is also proved that the proton implantation has little effect on the lifetime of the lasers.更多还原