【摘要】 非致冷测辐射热计以其高性能和低价格 ,成为红外热成像技术新的研究热点。焦平面设计为桥式结构 ,器件制作采用微机械加工技术。文章介绍了该器件的设计、制作、性能和应用。更多还原

【Abstract】 Uncooled bolometer infrared focal plane arrays with high-performance and low-cost have become research hot spots on infrared thermal imaging. Focal plane arrays are designed in bridge structure. The device is fabricated by means of micromachined process technology. In this paper,the design,fabrication,performance and application of the device are described.更多还原