【摘要】 在物理气相沉积过程中,触发真空间隙是整个试验过程中最基本的一步,很多因素影响真空间隙的成功触发,本文对此加以讨论,并提供一个合适的触发电路.更多还原

【Abstract】 It is essential to trigger the vacuum gap in the process of physical vacuum Deposition (PVD). According to practical experience, there are several factors influencing successful ignition. The paper presents a successful triggering circuit with necessary discussion.更多还原