【摘要】 本文就四极质谱计（主要是离子源和四极杆）污染对性能的影响进行了详细研究：分析了污染产生的过程；给出了污染前后离子源特性的变化；并对四极杆污染后离子工作点的变化进行分析计算，由此得出污染对离子注传输性能的影响。最后提了克服和减轻污染影响的方法。更多还原

【Abstract】 Detailed study of the effect of QMS(mainly ion source and quadrupole) contamination on performance is presented: describing contamination process; showing variation of ion source characteristic before and after contamination; calculating the change of ion operating point after quadrupole contamination, thus obtaining the effect of contamination on transmission of ion beam. Finally, methods of overcoming and lightening contamination effect are put forward.更多还原