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X光电子谱的散射修正

Scattering Correction for XPS

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【作者】 罗昭菊何炜

【Author】 Luo Zhaoju, Wei Ho (Department of ELectronic Engineering, Tsinghlua University, Beijing, 100084)

【机构】 清华大学电子工程系!北京100084

【摘要】 运用 W. S. M. Werner等学者的理论模型,研究光电子从产生处向固体表面输运过程中弹性散射和非弹性散射对XPS谱峰的影响,计算出散射响应函数,并将其应用于AU和Cu的XPS峰形修正中,用最大熵非负退卷积方法有效地消除散射响应失真,得到光电子在激发处的真实状态和谱峰。

【Abstract】 The influence of elastic and inelastic collisions of photoelectrons emitting from non-crystalline solid on the XPS peaks was studied using the theory of W. S. M. Werner etc.. The scattering respone function accounting for the effects of both elastic and inelastic scattering was derived in the framework of transport approximation. Then the true intrinsic XPS spectra of An and Cu were obtained by deconvoluting with the Maximum Entropy method.

  • 【分类号】O463
  • 【下载频次】56
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