【摘要】 介绍了一种新型无辅助阳极式磁过滤器的基本结构 ,测量了在弯曲弧磁过滤器出口处的离子分布规律。SEM分析表明 ,无辅助阳极式弯曲弧磁过滤器消除了等离子体中的宏观粒子团。采用无辅助阳极式弯曲弧磁过滤器在玻璃基体上镀铜可以使表面粗糙度Ra 从 0 44 μm降低到 0 0 0 3μm。更多还原

【Abstract】 A new type of curved magnetic arc filter has been developed,which requires no assistant anode ring,to effectively eliminate possible macroparticle contamination in film growth by vacuum cathode arc deposition.The ion current distribution at the ion exit of the filter was measured,which is considerably different from that in an anode ring assisted magnetic arc filter.The filter was used to grow copper films on glass.SEM micrographs of the copper films showed that the new filter is capable of effectively eliminating macroparticles and that the surface roughness can be reduced to R a=0 003 μm,which is much smaller than R a=0 044 μm for films grown with conventional vacuum arc deposition.更多还原