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SSRF电子储存环真空室材料电子激发解吸的实验研究
Experimental Studies of the Electron stimulated Desorption of Vacuum Chamber Materials for SSRF Storage Ring
【摘要】 用电子激发方法对SSRF储存环初步选定的真空室材料的动态出气特性进行了实验研究 ,得到了主要解吸气体成分的电子激发解吸系数与电子入射累积剂量的关系 ,对真空室材料经不同表面处理后的电子激发解吸特性进行了比较 ,初步确定了该真空室的表面处理工艺 ,为SSRF储存环超高真空系统的建立提供了一定的实验依据
【Abstract】 The dynamic outgassing characteristics stimulated by electrons have been experimental investigated for the vacuum chamber materials to be used in the SSRF storage ring.The ESD gas yield as a function of the integrated electron dose has been obtained.The ESD characteristics of samples treated with differential process have been compared.The treatment process for vacuum chamber has been preliminary determined.This work will provide some experimental basis for the construction of SSRF UHV system.
- 【文献出处】 真空科学与技术 , 编辑部邮箱 ,1999年02期
- 【分类号】TN10
- 【被引频次】1
- 【下载频次】50