【摘要】 本文介绍了一种用于有源矩阵液晶显示、具有对称结构的ＭＩＭ薄膜二极管，其中Ｔａ２Ｏ５膜采用溅射／阳极氧化两步法制成。实验结果表明，用此法制备的氧化钽膜作绝缘层的ＭＩＭ二极管，具有良好的开关特性，较大的通断比和较好的伏安特性对称性更多还原

【Abstract】 A MIM thin film diode with Ta Ta 2O 5 Ta symmetrical structure for active matrix LCD is presented in this paper.The Ta 2O 5 thin film insulator layers of the MIM thin film diode are formed by anodizing sputtered tantalum oxide films (sputtering/anodization two step process).Experimental results show that the MIM diode using the two step oxidized sputtered/anodized tantalum oxide film has better switching characteristics,higher switching on/off ratio and more symmetric I V characteristics.更多还原