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气相色谱法测定硅烷中的杂质氢
Measure of Impurity Hydrogen in Silane by GC
【摘要】 本文提出了用气相色谱法采用反吹系统测定硅烷中杂质氢的一种新方法,克服了硅烷对检测器的污染,方法快速、简单,检出限为2.4ppm。
【Abstract】 A new method of measuring impurity H2 in silane was put forword with GC andback-flushing tech-nigue system. This method can overcome detector polluted by silane,is guick and accurate at measuring. Its measuring limit is 2. 4 ppm.
- 【文献出处】 张家口农专学报 ,Journal of Zhangjiakou Teachers College , 编辑部邮箱 ,1999年01期
- 【分类号】O657.7
- 【被引频次】1
- 【下载频次】45