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X光多层膜反射镜的损伤与破坏

Destruction and Damage of X-ray Multi-layer Reflector

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【作者】 淳于书泰谷渝秋尤永禄黄文忠何颍玲马月英裴舒曹健林

【Author】 CHUNYU Shutai GU Yuqiu YOU Yonglu HUANG Wenzhong HE Yingling (China Academy of Engineering Physics, Chengdu, 610003 )MA Yueying PEI Shu CAO Jianlin(Changchun Institute of Optics and Fine Mechanics, China Academia Sinica,Changchun, 130022)

【机构】 中国工程物理研究院中国科学院长春光学精密机械研究所中国科学院长春光学精密机械研究所 成都 610003成都 610003长春 130022长春 130022

【摘要】 X光多层膜反射镜是软X光光学尤其是X光激光研究的重要元件。随着X光激光的发展,X光多层膜反射镜的应用日益广泛,但产生X光激光的等离子体环境给X光多层膜反射镜的应用带来困难,最突出的就是等离子体发射的X光对多层膜的损伤与破坏。通过模拟实验,给出国产Mo/Si多层膜反射镜的破坏阈值小于0.10J/cm~2。在这个剂量辐照下,多层膜表面均方粗糙度明显增加,反射率几乎降至为零。根据这些结果,该文提出了防止多层膜反射镜破坏的一些想法。

【Abstract】 Especially for the applications of X-ray lasers, X-ray multi-layer reflector is an important element for soft X-ray optics. With developing of the X-ray lasers and its applications, the uses of the X-ray multi-layer reflector become more wide-ranging. But the plasma environment which creates X-ray laser brings the difficulties to the application of X-ray multi-layer reflector. The biggest difficulty is that the X-ray emitted by the plasma destroys and damages the multi-layer reflector. It is shown by the experiments that the damage threshold of Mo/Si multi-layer reflector made in China is less than 0.10 J/cm2. Under the exposure to this radiation dose, the root-mean square roughness of multi-layer apparently increases and the reflectivity almost drops to zero. According to these results, the authors give some ideas for preventing damages of the multi-layer reflector.

【基金】 国家自然科学基金;中国工程物理研究院行业基金资助
  • 【文献出处】 中国核科技报告 ,China Nuclear Science and Technology Report , 编辑部邮箱 ,1999年00期
  • 【分类号】TN24
  • 【下载频次】40
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