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X光多层膜反射镜的损伤与破坏
Destruction and Damage of X-ray Multi-layer Reflector
【摘要】 X光多层膜反射镜是软X光光学尤其是X光激光研究的重要元件。随着X光激光的发展,X光多层膜反射镜的应用日益广泛,但产生X光激光的等离子体环境给X光多层膜反射镜的应用带来困难,最突出的就是等离子体发射的X光对多层膜的损伤与破坏。通过模拟实验,给出国产Mo/Si多层膜反射镜的破坏阈值小于0.10J/cm~2。在这个剂量辐照下,多层膜表面均方粗糙度明显增加,反射率几乎降至为零。根据这些结果,该文提出了防止多层膜反射镜破坏的一些想法。
【Abstract】 Especially for the applications of X-ray lasers, X-ray multi-layer reflector is an important element for soft X-ray optics. With developing of the X-ray lasers and its applications, the uses of the X-ray multi-layer reflector become more wide-ranging. But the plasma environment which creates X-ray laser brings the difficulties to the application of X-ray multi-layer reflector. The biggest difficulty is that the X-ray emitted by the plasma destroys and damages the multi-layer reflector. It is shown by the experiments that the damage threshold of Mo/Si multi-layer reflector made in China is less than 0.10 J/cm2. Under the exposure to this radiation dose, the root-mean square roughness of multi-layer apparently increases and the reflectivity almost drops to zero. According to these results, the authors give some ideas for preventing damages of the multi-layer reflector.
- 【文献出处】 中国核科技报告 ,China Nuclear Science and Technology Report , 编辑部邮箱 ,1999年00期
- 【分类号】TN24
- 【下载频次】40