【摘要】 具有立方莱夫斯相结构的Ｒｆｅ２ 赝化合物ＴｂＸＤｙ（１－ Ｘ）Ｆｅ２，在室温环境下具有极大的磁致伸缩量，应用这种材料研制的微位移驱动器，具有大位移、高分辨率及大输出力等特点。从驱动器使用角度出发，对这种材料的原理及特性进行了阐述，同时分析了超磁致伸缩驱动器的结构及特性。设计并研制了超磁致伸缩微位移驱动器，通过实验分析，驱动器的位移分辨率达０．５ ｎｍ ，行程范围达４０ μｍ ，在精密及超精密加工领域有着广阔的应用前景。更多还原

【Abstract】 The false compound Tb xDy (1-x) Fe 2 which has the cubic and Laves-phase structure as Rfe2 possesses much larger magnetostrictive in room temperature. The micro-displacement actuator made by this material features large displacement, high-resolution and strong output force.The theory and properties of this material is described from the application point of view,the structure and performance of giant magnetostrictive actuator are also analyzed,and the actuator is designed and manufactured successfully. Experimentally, the resolving power of the actuator is of 0 5nm,the range of displacement is of 40μm. It has potential application in the precision and super precision machining field.更多还原