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多道成像光谱探测列阵的研究
Research on the Multi-channel Imaging Spectrum Detecting Array
【摘要】 本文介绍一种多道成象光谱探测列阵的工作原理及设计思想。通过对器件主要技术参数的分析及低功耗扫描电路的应用,并采取场注入等平面工艺措施,使探测列阵的光敏象元结构得到改善,从而提高了探测器的响应度和动态范围,光谱分析范围则可由近红外区到紫外区。最后给出主要参数的实验数据。
【Abstract】 This paper describes the principle and designing method of multi-channel imaging spectral detecting array. With the analysis of main parameters by using the technology of low power dissipation scanning circuit and space injection level space fabrication technigue, the structure of device has been improved, The responsivity and dynamic range of detector have been increased, The spectral range of detector have been increased, The spectral range has been up to ultraviolet. The experimental data have also been presented in the paper.
【基金】 国家自然科学基金
- 【文献出处】 仪器仪表学报 ,CHINESE JOURNAL OF SCIENTIFIC INSTRUMENT , 编辑部邮箱 ,1999年02期
- 【分类号】TL814
- 【被引频次】5
- 【下载频次】81