【摘要】 研究了在化学喷射法制备ＳｎＯ２透明电热膜中，掺杂浓度、反应温度、退火工艺及喷射参数对电热膜光电性能的影响。结果表明在４００～６００℃、Ｓｂ３＋掺杂浓度在０１％～０４％之间，可获得透光率＞８５％，面电阻１００～１５０Ω的ＳｎＯ２透明电热膜。更多还原

【Abstract】 In chemical spraying process for fabrication of electro-thermal transparent SnO 2 films, influences of impurity concentration, reaction temperature, annealing techniques and spurt parameters on optic-electrical property of the electro-thermal films were studied. The results indicate that the electro-thermal transparent SnO 2 films with transparency >85% and surface resistance between 100 and 150 Ω are obtained with temperature in the scope from 400 to 600℃ and Sb 3+ concentration from 0 1% to 0 4%.更多还原