【摘要】 应用磁过滤真空阴极电弧离子沉积技术，以石墨为阴极靶材，在基片上沉积碳膜．利用光电子能谱，喇曼谱和扫描电镜对薄膜的结构形貌进行分析．结果表明：碳膜由具有金刚石特征ＳＰ３和非晶碳特征ＳＰ２的碳组成，并称之为无定形金刚石碳膜ａＤ．更多还原

【Abstract】 By the technology of the magnetic filter vacuum cathodic arc deposition,graphite as cathode.Carbon film was deposited on the Si,glass and stainless substrate.The structure and microstructure of the carbon film were analyzed by XPS,Raman spectroscopy,SEM.The results show that carbon film was composited with SP 3 bond character’s carbon and SP 2 bond character’s carbon.Which was called amorphous diamond film.更多还原