【摘要】 讨论了ＰＬＴ１５铁电薄膜的溶胶－凝胶制备技术，及ＰＬＴ薄膜的结构和电性能研究。结果表明，在Ｓｉ基片上成功地生长出钙钛矿型结构多晶铁电薄膜，在（１１１）Ｐｔ／Ｔｉ／ＳｉＯ２／Ｓｉ上外延生长出（１１１）ＰＬＴ１５铁电薄膜。溶胶－凝胶制备的ＰＬＴ１５铁电薄膜具有优良的热释电性能，其热释电系数ｐ为５．２５×１０－８Ｃｃｍ－２Ｋ－１，电压响应率优值ＦＶ达到０．７８×１０－１０Ｃｃｍ／Ｊ，探测率优值Ｆｍ为１．１３×１０－８Ｃｃｍ／Ｊ，适于制备热释电红外探测器更多还原

【Abstract】 This paper investigated the preparation of the PLT15 thin film by Sol Gel process and crystallographic、dielectric and pyroelectric properties.We have succeeded in preparation of perovskite structure polycrystalline PLT15 ferroelectric thin film on Si substrate and growth epitaxial (111)PLT15 thin film on(111)Pt/Ti/SiO 2/Si substrate.The PLT thin film have good pyroelectric properties.The pyroelectric coeffient、figure of merit for voltage responsivity F v and F m for specific detectivity of PLT15 films are 5.25×10 -8 C·cm -2 K -1 ,0.78×10 -10 C·cm/J and 1.13×10 -8 C·cm/J,respectively.It′s an attractive material for pyroelectric infared detectors.更多还原