【摘要】 介绍近年来准ＬＩＧＡ技术发展的概况，着重讨论国内外对它的各个工艺过程所采取的一些措施及其在微传感器和微执行器中的应用，并简单论述它的发展趋势。更多还原

【Abstract】 The recent development of quasi LIGA is introduced in this paper.Discussions are focused on the methods which have been adopted in each process and the applications in the micro sensors and micro actuators. Inaddition,the trends of the quasi LIGA development are briefly described.更多还原