【摘要】 】文中探讨用汽相沉积法制备ＳｎＯ２掺杂薄膜的不同工艺。研究ＳｎＯ２掺杂薄膜的光谱透过率气敏特性，测试掺５％Ａｇ的ＳｎＯ２薄膜在不同比例乙醇气体气敏作用下表面电阻气敏特性曲线。结果表明，汽相沉积法制备ＳｎＯ２掺杂薄膜工艺重复性好，灵敏度高，可用于制造新型的“气敏—光透过性”型气敏传感器。更多还原

【Abstract】 It is presented in this paper the technologe of manufacturing adulterated SnO 2 thin film made with vapour deposition and its spetrum transmission gas sensing characters.The gas sensitive curve of adulterated 5%Ag SnO 2 thin film’s surface resistance is tested in different alcohol gas environments. Experiment result shows that this method has many advantages such as well repeating ability of technology,higher gas sensitivity and so on.It can be used to make a new kind of gas sensitive optical sensor.更多还原