【摘要】 为了提高磁悬浮轴承高频电主轴控制系统中电涡流传感器的动态响应特性，针对恒频调幅式电涡流位移振动传感器，分析了电涡流传感器的基本结构和工作原理，建立了电涡流传感器检测电路数学模型，分析了电涡流传感器动态响应特性与检测线圈谐振回路品质因数 Ｑ 的关系，提出了对电涡流传感器动态响应特性在不影响灵敏度和线性测量范围的情况下进行线性校正的方法，从而使电涡流传感器幅频响应带宽提高一倍甚至几倍以上，相位角的滞后量也可以大大减小，充分满足了对磁悬浮轴承高速转子进行位移和振动的非接触性监测的需要。更多还原

【Abstract】 In order to improve the dynamic characteristic of eddy current sensor in active magnetic bearing (AMB) controlling system,in allusion to amplitude modulation vibration and displacement eddy current sensor, by the means of mathematical model analysis, the relations between the sensor dynamic characteristic and the quality of the parallel tank circuit of eddy current sensor are found out and analyzed in this papre, and also, the transform function of eddy current sensor is given. Through simple cascade compensation circuit, a double or larger bandwidth and a minimum phase shift is reached.更多还原