【摘要】 本文报道了多孔硅的制备方法及形成条件,并对掺La（OH）₃多孔硅的感湿特性进行了实验研究,结果表明掺La（OH）₃多孔硅的交流阻抗随环境温度的增大而减少,呈近似线性规律,敏感度变化很小。掺La（OH）₃多孔硅化传统的LiCl敏感材料的繁感度有所提高。更多还原

【Abstract】 In this paper,a method for preparation and forming condition of porous silicon are reported. The humidity - sensitive properities of porous silicon doped La(OH)3 were studied in experiment. The results show that altemating impedance of porous silicon-doped La(OH)3 decreases in approximate linearity relation with environment humidity rising. The compared humid sensitivity of porous silicon doped La(OH)3 was improved with traditional LiCl materials.更多还原