【摘要】 对一种圆柱状结构、基于弯曲振动模式的压电超声微马达作了一些结构改进性探索和实验研究，并采用有限元方法对其振动模式进行了分析．已研制的直径为15mm、长25mm的微马达样机，显示出非常高的角分辨率（0．01°）、低速（30r／min～70r／min）和大的力矩（0．055N.m）特性，已在激光多维精密控制系统中获得成功的应用．更多还原

【Abstract】 A rod-type piezoelectric ultrasonic micro-motor based on bending vibration mode withimproving construction was studied experimentally in this paper. The prototype motor with diameterof 15 mm and length of 25 mm has demonstrated its super characteristics such as very high resolution(0.01°), low speed with large torque output (30 r/min ~ 70 r/min and 0.55 kg. cm etc. and it has beensuccessfully applied to precise positioner with multi-freedom for laser resonant cavity.更多还原