【摘要】 利用宽度弯曲振动模式，制成了平面分割电极型片状压电致动器．分析、测试了致动器的位移－驱动电压特性和谐振频率．典型结果是１２Ｖ驱动电压下可获得０．４６μｍ的位移量，谐振频率为１０．７ｋＨｚ．满足该指标的致动器可用于制作高密度硬磁盘磁头定位两级伺服系统的第２级精定位致动器更多还原

【Abstract】 Rigid disk drive will have track density of the order of 25 000 track per inch in few years. This would require a servo bandwidth of head positioning system of at least 3 kHz. The increase in bandwidth, however, is limited by the presence of mechanical resonance modes and other nonlinearities in the voice coil motor (VCM) actuators. A dual stage servo system may be needed to achieve such a high track densities. This would involve a high bandwidth microactuator for rapid position corrections of the recording head, coupled with a conventional VCM actuator. This paper presents a planar piezoelectric actuator. This new type of split electric actuator is based on width bending mode. It has a high bandwidth, large displacement and simple structure. The displacement driving voltage characteristics and resonance frequency of the actuator were studied. Typically, the mini actuator generates 0.46 μm displacement under 12 V driving voltage. The primary resonance frequency is about 10.7 kHz. The results show that the new actuator can be used as a fine tunning for locating the recording head in the dual stage servo system .更多还原