【摘要】 提出了一种多层１／４波长膜系的薄膜厚度监控方法．利用这种方法可以在监控过程的同时得到膜层的光学常数且具有监控精度高的优点．该方法也可用于非１／４波长膜系的控制更多还原

【Abstract】 A film thickness monitoring control method for quarter films was presented in this paper.By using this method,the optical constant of layer can be determined at the same process.This method can also be used to monitor the unquarter films according to the measurement of the films reflectivity,and it has advantage of improving accuracy,increasing productivity and improving the film product quality.更多还原