【摘要】 ＦＥＤ（ＦｉｅｌｄＥｍｉｓｉｏｎＤｉｓｐｌａｙ，场致发射显示器）是世界上发达国家正在研制的一种具有巨大潜在市场的平板型显示器件，支撑技术是ＦＥＤ研究中的关键技术之一，也是微细加工技术领域的一个有意义的研究课题。叙述了ＦＥＤ对支撑技术的研究要求，介绍了美国、日本的几家公司和研究机构近几年的支撑技术研究方案和结果。更多还原

【Abstract】 FED(Field Emission Display)is a new f lat panel display showing great market potential,on whose fabrication many devel oped countries are doing research.Meanwhile,spacer technology is not only one of the key technologies of FED fabrication but also a meaningfultopic in the field of micro fabrication technolgy.In this paper,the requirements of qualified FED spacers are presented,various spacer fabrication technologies adopted by some r esearch groups and companies in USA and Japan are introduced.更多还原