【摘要】 简要介绍了利用ＬＩＧＡ技术中同步辐射光刻、微电铸技术制作α粒子编码成像波带片的研究，讨论了编码波带片的结构和影响波带片的平面和层析分辨率的参数。根据实验要求设计和研制了一种α粒子编码成像波带片。更多还原

【Abstract】 The paper reports the fabrication of Zone Plate Coded Imaging(ZPCI)of α particle using LIGA technique which is combination of deep lithography,electroforming and molding.The structure and parameters effecting the resolution of ZPCI is investigated.We designed and developed a kind of α particle ZPCI The experiment indicated that it is a successful method of fabrication of ZPCI using LIGA technique.更多还原