【摘要】 介绍一种可用于沉积类金刚石薄膜的过滤式真空电弧沉积系统，研究了利用该系统制备的类金刚石薄膜的Ｒａｍａｎ光谱测试结果。实验表明，所设计的系统能可靠地触发并运行１００Ａ的碳电弧，电弧连续稳定燃烧的时间长于１０ｍｉｎ。在Ｓｉ（００１）、硬质合金和不锈钢等衬底上成功地制备出ＤＬＣ薄膜，沉积速度约为６０ｎｍ／ｍｉｎ。Ｒａｍａｎ光谱表明，所制备的ＤＬＣ涂层具有非晶结构，且ｓｐ３含量比脉冲激光沉积的类金刚石薄膜高。更多还原

【Abstract】 A system is studied to prepare diamond like carbon (DLC) coatings utilizing filtered vacuum arc deposition (FVAD) system. The Raman spectrum of the DLC coatings prepared by the system is investigated. Carbon arc of D.C. 100A current can be triggered reliably and sustained continuously for more than 10 minutes. DLC coatings were deposited onto Si(001), hard alloys and stainless steels with a deposition rate of～60nm/min. Raman spetrum shows that the coatings are of amorphous structure without nanocrystals of graphite or diamond. The contents of sp 3 bonds are higher than the DLC coatings prepared by pulsed laser deposition.更多还原