【摘要】 对目前的几种软Ｘ射线光学元件的性能作了简要的阐述和分析．综合介绍了多层膜作为软Ｘ射线光学元件的新进展．同时对多层膜光栅这种新型软Ｘ射线光学元件的原理、性能、制作工艺进行了详细的说明更多还原

【Abstract】 An outline is given of the properties of various commonly used soft X-ray optical equipment. Recent development of multilayers in soft X-ray optics is described, with a detailed account of the theory, properties and manufacture of a new type of soft X-ray optics, multilayer gratings.更多还原