【摘要】 介绍了类金刚石薄膜的结构特征，并详细讨论了采用物理化学气相沉积方法制备类金刚石薄膜过程中各相关参数之间的关系以及对薄膜结构和性质的影响更多还原

【Abstract】 Abstract We present the structure features of diamond like films,discuss the relation between the coefficients in the preparation of diamond like films and analyse how these coefficients affect the structure and property of the films in detail.更多还原