【摘要】 用XPS对不同凡的Gd-Ba-Cu-O超导膜做了定量、角分布、成象和离子剥蚀纵深分析．结果表明：样品表面都存在Ba富集和Gd短缺，表面原子微观分布不均匀；表面和纵深都存在含C物质污染；与Tc≥87K的样品比较，Tc≤77K的膜表面对应于非超导相的Ba和O原子浓度最高，膜的纵深处的原子组成仍偏离化学计量，而且膜表面和纵深处的含C物污染最严重．更多还原

【Abstract】 Superconducting Gd-Ba-Cu-O films with varying Tc were studied by using XPS quantitative analysis, XPS angular distribution, XPS imaging and ion etching. The results show that the surface layer of all films is Ba enriched and lacking in Gd. The elemental distribution on surface is inhomogeneous. The surface and the deep region of the films are contaminated by C-containing compounds. As compared with the sample with Tc≥87K, the sample with Tc＜77K has the highest atomic concentration of Ba(HBE) and O(HBE) corresponding to non-superconducting phase on the surface. In the deep region (20-30 nm) of sample with Tc＜77K, the chemical composition is still nonstoichiometry. The contamination of C-containing compounds in both the surface and the deep region is more serious for the sample with Tc＜77K than the samples with Tc≥87K.更多还原