【摘要】 利用离子束增强沉积技术， 在 Ｓｉ （１１１） 和 Ｇ Ｃｒ１５ 轴承钢基体上沉积 Ｃｒ Ｎ 镀层研究氮分压、 Ｎ＋ ＋ Ｎ＋２ 离子轰击能量和 Ｎｉｏｎｓ Ｃｒ ａｔｏｍｓ 到达比对镀层组织结构的影响结果表明， Ｃｒ Ｎ 镀层组织对氮分压敏感， 随着氮分压的增加， 镀层中 Ｃｒ Ｎ 组份增加， 金属 Ｃｒ 及 Ｃｒ２ Ｎ 组份减少； 随着氮离子轰击能量的增加， Ｃｒ Ｎ 镀层中 Ｃｒ Ｎ （２００） 择优生长； 但当 Ｎｉｏｎｓ Ｃｒ ａｔｏｍｓ 比从１４５ ×１０ － ２ 增至５８７ ×１０ － ２ 时， 镀层中 Ｃｒ Ｎ 组份非但没有增多， 反而使镀层中的 Ｃｒ 以 Ｃｒ２ Ｏ３ 形态存在更多还原

【Abstract】 This paper studies the structure of IBED Cr N coatings with different parameters such as N partial pressure, N ions bombarding energy and N ions/Cr atoms ratio The results show that the chemical composition and structure of the coatings are mainly determined by N partial pressure According to N partial pressure increasing, there are an increase of CrN phase and a decrease of Cr and Cr 2N phase The grain orientations of the coatings are affected by bombarding energy When N ions/Cr atoms ratio changed from 1 45×10 -2 to 5 87×10 -2 , high N ion flux of bombarding will result in acceleration of sputtering away from the coated CrN layer as well as its decomposition In the mean time Cr 2O 3 is easy to be produced in the layer更多还原