【摘要】 通过双靶轮流反应溅射的工艺方法制备了ＴｉＮ／ＡｌＮ纳米混合膜．采用ＸＲＤ衍射、ＴＥＭ和显微硬度等测试方法对ＴｉＮ／ＡｌＮ纳米混合膜的微结构和力学性能进行了研究．结果表明，ＴｉＮ／ＡｌＮ纳米混合膜的晶粒大小为１０～２０ｎｍ；薄膜总体表现出硬度增强效果，在ＴｉＮ∶ＡｌＮ（体积比）≈１∶１时，薄膜硬度获得极大值ＨＫ３２．２５ＧＰａ．更多还原

【Abstract】 This paper researched TiN/AlN nano granular thin films, whose microstructure and hardness were detected by X ray diffraction, transmission electron microscopy and indentor respectively. The TiN/AlN nano granular thin films were prepared by rotating the substrates at speed of 20 r/min and the composition of them can be controlled by modifying the targets power. In the TiN/AlN nano granular thin films, the grain size is about 10～20 nm. The enhanced hardness reaches the maximum HK32.25GPa when TiN∶AlN≈1∶1.更多还原