【摘要】 采用不同的优化算法，设计了ＩＣＦ均匀照明二元光学器件。提出了全局／局部联合搜索算法（ＧＬＵＳＡ），对平面输入波获得了旁瓣小、光强均匀的设计结果。完成了１６价浮雕表面结构的位相板的试制加工，并利用光学ＣＴ法测量了焦斑光强分布，实验结果表明获得了较好的光强包络，但顶部均匀性还有待进一步提高。将单元器件扩展为阵列器件，增加了对输入光波畸变的宽容度。更多还原

【Abstract】 In the Inertial Confinement Fusion(ICF) system, rigorous requirements of target illumination are requested, such as top flat, steep edge, low sidelobes and high light efficiency. Binary optical element(BOE) is a very important approach to realize the above requirements. A hybrid algorithm, GLUSA(Global/local united search algorithm), was developed for designing phases of the BOE. The simulated results showed that BOE arrays applied can decrease the sensitivity of the input phase and amplitude distortion.A 16-phase-level BOE was manchctured by a pattern generator, photolothography and ion-etching sequentially. Based on the optical Computerized Tomography(CT), a measurement system for two-dimensional intensity distribution has been set up. Experiment results declare that the focal spot of the BOE obtained hasthe expected intensity envelope, but a gap still exists between the experiment result and the designed value.更多还原