【摘要】 研究了一种新型的谐振式硅微加速度传感器，对其结构和工艺进行设计，并制作出了一系列不同结构和尺寸的这种器件。该加速度传感器在制作支撑梁的同时制作了用于检测信号的谐振梁，并采用电阻热驱动、压阻桥同步检测的方法来获得信号输出。设计方案利用了压阻传感技术和体硅微加工技术，又拥有谐振原理所带来的高分辨率，高稳定性和易于与信号处理电路结合的优点，以较低的成本获得了很高的器件性能。其结构尺寸从３ｍｍ×４ｍｍ到６ｍｍ×６ｍｍ不等。更多还原

【Abstract】 A novel resonant microaccelerometer was reported which is designed and fabricated using silicon micromachining technology. The microaccelerometer has a bulk silicon structure with supporting hinge and resonant microbeam fabricated at the same time. The resonant microbeam is driven by electric current and the frequency shift due to the change of acceleration is detected with a piezoresistive bridge. The accelerometer has the advantage of the mature fabrication technology of piezoresistive type sensor and the quasidigital signal output of the resonant type sensor which make its output signal precise, stable and easily processed by digital circuit. The structure size varies from 3mm×4mm to 6mm×6mm.更多还原