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组合式熔凝石英微透镜阵列-线列Yba₂Cu₃O_7-δ高温超导薄膜红外探测器的研究

Study on the Technique for the Hybrid IR Detectors of Quartz Microlens Array and YBa₂Cu₃O_7-δ High Tc Superconductors

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【Author】 Zhang Xinyu; Li Baoping; Yi Xinjian; He Miao; Zhao Xingrong (Department of Optoelectronic Engineering, Huarhong University of Science and Technology wuhan 430074) ( Shanxi Qinghua Research Institute of Machinery & Electronics Changan 710111)

【机构】华中理工大学光电子工程系!武汉； 430074；陕西青华机电研究所!陕西长安； 710111；

【摘要】采用准分子激光扫描消融法淀积YB32C23O7-δ高温超导薄膜，利用常规光刻工艺制备线列高温超导薄膜器件，采用离子束刻蚀制备与高温超导薄膜器件匹配的熔凝石英微透镜阵列，测试了微透镜／高温超导薄膜器件所构成的混合结构在1～5μm红外波段的几项重要的光响应特性．更多还原

【Abstract】 The YBa2Cu3O7-δ high Tc superconducting thin film were deposited by excimer laser scanning ablation, the superconducting thin film detectors were patterned by photolithography method, the single plate cylinder microlens arrays were fabricated by Ar ion beam etching, the hybrid IR detecting device was prepared by using the special glue to couple the micro-optical device and the superconducting thin film IR device, and the optical response characteristics of the device fabricated in the region of 1～5 μm IR optical spectrum was investigated.更多还原