【摘要】 研究了硫化热处理工艺参数对磁控溅射Ｆｅ膜转变为ＦｅＳ２膜的作用。结果表明，在８０ｋＰａ硫化压力条件下，４００℃等温１ｈ或２００℃等温１０ｈ便可使Ｆｅ膜开始产生硫化反应；４００℃、６０ｋＰａ等温２０ｈ的热处理条件可使硫化产物最接近ＦｅＳ２计量成分；硫化温度升高可使薄膜中的ＦｅＳ２晶粒尺寸增大。更多还原

【Abstract】 The effects of the processes of sulphuration heat treatment on the pyrite thin films have been investigated The experimental pyrite films were synthesized from the iron layers deposited by magnetron sputtering on glass substrates The results showed that the sulphuration reaction occurs when the iron layers are sulphurated at 400℃ for 1h or at 200℃ for 10h in 80kPa sulphuration atmosphere The film sample sulphurated at 400℃ for 20h in 60kPa sulphuration atmosphoere shows more approximate FeS 2 stoichiometrical composition With increasing the sulphuration temperature,the FeS 2 grain size increases更多还原