【摘要】 微波（２４５ＧＨｚ）使放电管（φ３２ｍｍ）产生等离子体，在其同直径渗氮管下游区活性原子浓度高、寿命长［１］，处理金属材料无尺寸和位置限制，４５、２０钢渗氮后微观分析发现，其表面没有化合物白层（ε、γ、γ’相），Ｘ射线衍射（ＸＰＤ）分析，仅存在αＦｅ相结构，Ｘ射线光电子谱（ＸＰＳ）分析材料表面有Ｎ元素。测出渗氮试样比未渗氮试样的显微硬度高８０％。其原因为αＦｅ峰值位移变化，材料晶格参数改变，表面氮扩散层引起显微硬度提高。更多还原

【Abstract】 Our present works showed that steel nitriding process was performed in downstream of microwave (2 45GHz) plasma,where the active atomic nitrogen had a high concentration,long life ,and in the meanwhile,the location and the samples dimension were not limited After steels had been nitrided,X ray diffraction (XRD) and X ray photoelectron spectroscopy (XPS) were utilized to characterize the nitrided samples surface The results showed no ε Fe 2 3 N,γ Fe 4N existence but only nitrogen interstitial atom in α Fe phoase with its peaks shifted The samples microhardness value increased by 80 percent compared with the untreated one It was believed that the nitrogen atom diffusion layers cause these results更多还原