【摘要】 介绍一种原路相干相位检测的标定方法，该方法具有很高的精度，对相移器的线性没有特别要求，相移器的标定与使用是同一光路，消除了标定光路与使用光路不同所带来的误差更多还原

【Abstract】 The phase shifter is a key element in phase shifting interference metrology. Its calibration is an important process that cannot be neglected. The accuracy of calibration has a great influence on the measuring precision. It determines the success or failure of a phase shifting technique. A calibration method of a phase shifter is presented in this paper. It owns the features of high precision and has no special requirement for the linearity of the phase shifter. The calibration is performed with the same optical set up as it is actually used. The errors owing to the different optical paths for calibration and for actual use are thus deleted.更多还原