【摘要】 研究了在碳含量不同的钢基体上化学气相沉积ＴｉＮ的沉积速率。研究结果表明，随着钢中碳含量的提高，沉积速率呈线性增长，涂层硬度也随碳含量的增加而提高。基于铁的触媒作用，推导出ＴｉＮ的沉积速率方程为Ｖ＝ ｈ１＋ Ｋ１×ｘ（Ｃ）；对于碳含量较高的Ｃｒ１２ＭｏＶ钢和碳含量较低的２０钢基体，测得ＴｉＮ 沉积表面过程表观活化能分别为１６５．１１ ｋＪ／ｍ ｏｌ和１２０．３８ ｋＪ／ｍ ｏｌ。钢中合金元素对ＴｉＮ沉积速率的影响可忽略。更多还原

【Abstract】 The effects of carbon content of steel substrates on the deposition rate of CVD TiN coatings were investigated. The increment of deposition rate is linearly related to the increase of carbon content in substrate material. The hardness of TiN coating is increased with the increment of carbon content in substrate. According to the iron catalytic action on TiN deposition the relationship between deposition rate of TiN and carbon content in the substrate, an equation was derived as V=h 1+K 1×x (C). When steel Cr12MoV and steel 20 were used as the substrates of TiN deposition, the activation energy for TiN deposition was 165.11 kJ/mol and 120.38 kJ/mol respectively. It was showed that the effects of alloy elements on TiN deposition rate could be neglected.更多还原