【摘要】 微结构气敏传感器是利用微电子、微机械和薄膜等技术制作的新一代气敏元件。本文报道有限元方法在膜片型微结构气敏传感器设计中的应用。结果表明，有限元方法可用于模拟膜片上的温度分布和器件功耗，对器件结构设计有很好的指导作用。更多还原

【Abstract】 The micro gas sensor is a device of new genera-tion, which is Inade through microelectronic, hacronachin-ing and thin film technologies. The application of finite ele-ment method (FEM) in the design of a membrane-type thecrogas sensor is reported. The results show that FEM can beused to simulate the temperature distrihution and powr con-sumption of the device; and it is a helpful tool for the struc-thal design of devices.更多还原