【摘要】 微机电系统是基于纳米技术迅速发展起来的新兴技术，在航空、航天。信息、军事、环境控制、医疗、生物工程学等领域有广泛应用。它的巨大潜力将给国家带来难以估量的经济效益和社会效益。本文简要介绍微机电系统技术及相关的测试和控制问题。更多还原

【Abstract】 The NEMS (micro-electro-mechanical systems ),based on the nanotechnology, is a rapid developing technology. It will be get wide use in the field of aviation, aerospace, information and communication, military affairs,medicine, hioengineeIing and so on. It’s great potentialitywill bring huge benefit to the country and sociaty. TheMEMS,the probiems of it’s measureing and controlling areintrodllced:tyriefly.更多还原